The College of Nanoscale Science and Engineering at University at Albany comprises a $4.5 billion, 450,000-square-foot complex for research, development, prototyping, pilot manufacturing and education for semiconductors and nanoelectronics. CNSE houses a fully-integrated, 300mm wafer, computer chip pilot prototyping and demonstration line. An expansion currently underway will increase the size of the complex to over 800,000 square feet, including over 80,000 square feet of Class 1 cleanroom space, to house over 2,500 scientists, researchers, engineers, students, and faculty.
The special equipment capability of CNSE also includes:
Lithography and Patterning tools:
1 EV Group Aligner with front to backside capability
1 EV Group Wafet Bonder
1 Photoresist track process center
Thin Film Deposition and Grwth Tools
10 Specialized 200mm wafer CVD systems
5 commercial stand alone 200mm wafer CVD tools
2 Electrolytic Plating systems
1 LAM quad 480 CVD Cluster tool
1 Quester TEOS dielectric deposition tool
1 Modified novellus MB2PVD/CVD Cluster tool
1 CVC connection PVD Cluster Tool
1 TEL 4 Chamber CVD Cluster Tool
1 Modified novellus MB2 PVD/CVD Cluster Tool
1 TEL 4 Chamber CVD Cluster Tool
1 Tube Furnace for Poly-Si Growth
1 Tuve Furnace for Silicon-dioxide Growth
1 Tube Furnace for Silicon nitride growth
1 RTP Furnace
1 E-beam evaporation system
1 3MeV tandem accelerator
1 Varian 400 keV ion implanter
1 Danfisyk 150 keV ion implanter
Characterization facilities
JEOL 2010F Transmission Electron Microscope with EELS Typical applications
JEOL 200 CX Transmission Electron Microscope
Hitachi S-4000 Scanning Electron Microscop3 with Energy Dispersive X-Ray Detector
LEO 1550 SEM w /EDS
FEI Nova NanoLab 600 Dual Beam with Energy Dispersive Spectroscopy
JEOL 8600 WDS Microprobe with 4 crystal detectors
Thermo VG Scientific Theta Probe X-ray Photoelectron Spectroscopy (XPS)
Perkin-Elmer PHI 600 Auger Electron Spectroscopy (AES)
Scintag X-ray Diffractometer (XRD)
Digital Instruments Nanoscope III Scanning Probe Microscope (SPM)
Digital Imaging Atomic Force Microscope (AFM)
JEOL 4200 Atomic Force Microscope (AFM)
Bruker D8 DISCOVER High Resolution X-ray Diffractometer
JEOL 8600 WDS Microprobe with 4 crystal detectors
Nicolet Magna 75011 FTIR infrared spectroscopy
Renishaw Raman Spectrometer
Linear Accelerator: Rutherford Back-scattering (RBS) analysis; Nuclear Reaction analysis (NRA)
Ion-TOF: ToF-SIMS-5-300 Time of Flight Secondary Ion Mass Spectrometer (ToF-SIMS)
SOPRA- Spectroscopic ellipsometer
NOVA 4200e
High Current 4 Probe I-V Testing
Tektronix 371A Curve Tracer
Close Cycle Cryogenic Refrigerator
Thermal Cycling Refrigerator
Princeton Applied Research PARSTAT 2273 Potentiostat
Wells-Brookfield Cone/PlateViscometer (Model LVDVII)
Conductivity meter (Model CDM 230)
Three electrode half cells
Vac East Glove box